PHOTODETACHMENT ANALYZER

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PROBLEM TO BE SOLVED : To provide a compact photodetachment analyzer, capable of detecting the substance (detached gas) or detached components photodetached from the surface of a sample, and of emitting lights of a large range of wavelengths, from the extreme-ultraviolet range to the visible range.SOLUTION : This photodetachment analyzer (D) comprises a light source device (D1), having a laser light source device (6) which irradiates rare gas inside a generation part (1a) with a laser beam (L) to generate plasma and generates light from the vacuum-ultraviolet range to the visible range, emission spectroscopy focusing systems (11-17) which are integrally formed of a spectroscopic system (12) arranged inside the light generating part (1a) and dispersing the generated light; a catoptric system (11) arranged inside the light generation part (1a), reflecting the generated light and focusing the light onto the spectroscopic system (12); and a light focusing optical system (13) arranged inside the light generating part (1a), focusing the light with an identical wavelength dispersed from the spectroscopic system (12), and irradiating the sample (S) with the light; and a mass spectrometer (26) arranged inside a vacuum chamber (D2) and detecting the substance detached from the sample (S)irradiated with the light.COPYRIGHT : (C)2008, JPO&INPIT