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The present invention discloses a grain boundary diffusion method of an R-Fe-B series rare earth sintered magnet, an HRE diffusion source, and a preparation method thereof, comprising the following steps : method step A of forming a dry layer on a high-temperature-resistant carrier, the dry layer being adhered with HRE compound powder, the HRE being at least one selected from a group consisting of Dy, Tb, Gd, or Ho; and method step B of performing heat treatment on the R-Fe-B series rare earth sintered magnet and the high-temperature-resistant carrier treated with the method step A in a vacuum or inert atmosphere and supplying HRE to a surface of the R-Fe-B series rare earth sintered magnet. The method can reduce the consumption of heavy rare earth element and control the loss of residual magnetism Br while increasing the coercivity.