HIGH DENSITY, LOW OXYGEN RE AND RE-BASED CONSOLIDATED POWDER MATERIALS FOR USE AS DEPOSITION SOURCE

文件类型：PDF文档
文件大小：1207K
PURPOSE : A high density and low oxygen Re and Re-based consolidated powder material usable as a deposition source and a manufacturing method thereof are provided to form a sputtering target.CONSTITUTION : A method comprises the steps of : (a) providing a Re powder starting material or a Re powder starting material and at least one additional powder material, (b) processing at least the Re powder by a first degassing treatment to reduce the oxygen content thereof, (c) increasing the density of the degassed Re powder or a mixture of the degassed Re powder and the at least one additional powder material to form a green billet, (d) processing the green billet by a second degassing treatment to reduce the oxygen content thereof further; and (e) consolidating the green billet to form a consolidated material with greater than about 95%% of theoretical density and low oxygen content below about 200ppm for Re and below about 500ppm for Re-based materials formed from the mixture, excluding oxygen from non-metallic compounds and/or ceramics.? KIPO 2008