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PROBLEM TO BE SOLVED : To provide a manufacturing method of a high performance R-Fe-B based permanent magnet with little use amount of a rare earth element, in particular, Tb and/or Dy.
SOLUTION : By applying a heat treatment to a sintered magnet of an R1aTbBcMdOeCfNg composition (wherein, R1 is a rare earth element; T is Fe or Co; M is Al, Cu, Zn, In, Si, P, S, Ti, V, Cr, Mn, Ni, Ga, Ge, Zr, Nb, Mo, Pd, Ag, Cd, Sn, Sb, Hf, Ta or W; a to g are the respective element atomic% in the alloy and are 12≤a≤17, 3≤c≤15, 0.01≤d≤11, 0.1≤e≤4, 0.05≤f≤3, 0.01≤g≤1, and the remainder is b, and a≥12.5+(e+f+g)×0.67-c×0.11) in a state with powders containing an oxide of R2, an fluoride of R3 and an acid fluoride of R4 (wherein, R2, R3 and R4 are each an rare earth element) present on the surface of the sintered magnet, R2, R3 and R4 contained in the powders are absorbed into the sintered magnet.
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