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ALUMINUM NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCING SAME

2025-06-20 16:321270下载
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An aluminum nitride sintered compact which comprises aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and aluminum element, characterized in that : the median diameter of the aluminum nitride crystal grains is 2 μm or less; in the aluminum nitride sintered compact, 10-200 gaps having the longest diameter of 0.2-1 μm are dispersed among the grains per 100 μm2 of cross sectional area; and the carbon atom content is less than 0.10 mass%.


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