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TARGET FOR LASER ABRASION AND PROCESS FOR PRODUCING THE SAME

2025-06-19 07:304330下载
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To provide an RE-based oxide superconducting sintered body that can be used as a target applicable to a laser ablation method without bonding it to a backing plate, and a manufacturing method of the same. Each kind of powder or solution is prepared, and when a composition formula of an RE-based oxide superconductor is expressed by REaBabCucOx, raw materials are weighed and mixed so as to satisfy a + b + c = 6, 0.95 < a < 1.05 and 1.505 = c / b < 1.6, and thereafter calcinations, pulverization, sintering, pulverization, and molding are carried out to obtain the RE-based oxide superconducting sintered body, and this RE-based oxide superconducting sintered body is used as a laser ablation target.


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