CARBON FILM

文件类型：PDF文档
文件大小：113K
PROBLEM TO BE SOLVED : To provide a carbon film for improving the abrasion resistance and durability of tools, dies, machine parts or the like instead of a diamond film or a diamond like carbon film.SOLUTION : The carbon film is deposited in an atmosphere satisfying a vacuum degree of ≤0.05 Pa at a synthesis temperature of 100 to 300°C using isotropic graphite as solid carbon by a cathode arc ion plating process, and has a density of 2.8 to 3.3 g/cm3, a spin density of 1×1018 to 1×1021spins/cm3 and a knoop hardness of 1, 500 to 6, 000. Preferably, the concentration of carbon is controlled to ≥99.5 atomic%, the concentration of hydrogen is controlled to ≤0.5 atomic%, the concentration of rare earth elements is controlled to ≤0.5 atomic%, and the knoop hardness is controlled to 2, 000 to 6, 000. A carbon film-coated member coated with the carbon film has excellent abrasion resistance and durability.COPYRIGHT : (C)2008, JPO&INPIT