Thermal spray powder and method for forming thermal spray coating

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PURPOSE : A thermal spray powder is provided to be suitable for forming a thermal spray coating layer having high plasma corrosion resistance. CONSTITUTION : A thermal spray powder comprises particles containing an oxide of any one of rare earth elements having an atomic number of 39 or 59-70, wherein the particles have a crushing strength of 80 MPa or more and a ratio of bulk specific gravity to true specific gravity of 0.15 or more. The particles are granulated and sintered particles, and primary particles forming the granulated and sintered particles have an average particle size of 6 micron or smaller. The rare earth element contained in the rare earth oxide constituting the particles has a coordination number of 6 and a trivalent ion radius of 0.865 nm or larger. Further, an average size of the particles of the thermal spray powder is 5 to 40 μm. © KIPO 2008