Apparatus for Concentration of Waste Helium

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PURPOSE : A cryogenic concentration apparatus for neon/helium is provided to prevent closing of a cryogenic path due to water and safely operate a process of concentrating the toxic, combustible, corrosive and oxidative gases when considerable amounts of water, toxic, combustible, corrosive and oxidative gases are contained in a mixed gas in a process of recovering waste helium gas and performing cryogenic concentration of the helium gas. CONSTITUTION : As an apparatus for cryogenic concentration of waste helium gas containing a plurality types of impure gases, the waste helium gas concentrating apparatus comprises : a compressor(C-1) for boosting the pressure of a mixed gas; a water cooler(CW-1) for mixed gas compressor; a pre-cooler(PH-1) for pre-cooling the mixed gas; a main heat exchanger(MH-1) including a liquid nitrogen re-evaporator(R-2) and a condenser(H-2) for condensing nitrogen in the mixed gas; a container(NL-1) for separating liquefied nitrogen; a liquid nitrogen expansion valve(EV-1); a cold-reserving bed for a liquefied nitrogen separating column; a drying equipment(D-1) for preventing closing of a path due to freezing of water; and a mixed liquid discharge pipe for emitting impure gases through a lower part of the liquid nitrogen re-evaporator, and a cold-reserving heat exchanger. © KIPO 2008