MAGNESIUM OXIDE THIN FILM AND ITS MANUFACTURING METHOD

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PROBLEM TO BE SOLVED : To provide a technology to manufacture a magnesium oxide thin film high in visible light transmission and high in sputtering resistance with an applying method. SOLUTION : The magnesium oxide thin film is manufactured by a magnesium oxide particulate dispersion liquid being applied on a substrate and baked, and has a film thickness in a range of 100 to 1, 000 nm and a white light transmission of 95% or more. The magnesium oxide particulate dispersion liquid contains a metal-containing compound in a range of 1.5 to 3.5 mol of a total mol content of a metal contained in the compound per 100 mol of a magnesium oxide, and uses a monohydric alcohol with a carbon atom number of 3 to 5 as a dispersion medium, where the metal-containing compound is of other than oxides containing alkaline earth metals, rare earth metals, and metals belonging to a group 12, 13, 14 or 15 in the long period-type periodic table. The magnesium oxide is dispersed in the monohydric alcohol as particulates within a range of 5 to 40 nm of D50measured by a dynamic light scattering method. COPYRIGHT : (C)2009, JPO&INPIT