CERAMIC MEMBER AND CORROSION-RESISTANT MEMBER

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PROBLEM TO BE SOLVED : To provide a ceramic member having high density, a small particle diameter and excellent plasma resistance. SOLUTION : A ceramic member consisting essentially of a rare earth oxide is composed of a fine structure comprising fine particles. By constituting the ceramic member to have an average particle diameter of less than 3 μm, an open porosity of less than 0.3% measured by an Archimedes method and the maximum particle diameter of less than 5 μm so as to decrease open pores, portions as start points of plasma corrosion can be decreased, and thereby, the obtained ceramic member is excellent in plasma resistance. By constituting the member of small particles while suppressing abnormal particle growth, particle contamination due to production of dust can be decreased. COPYRIGHT : (C)2009, JPO&INPIT