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Ag-based alloy sputtering target for an optical information recording medium

2025-06-19 06:033360下载
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PROBLEM TO BE SOLVED : To provide such a sputtering target as to impart high reliability to a hyper-speed DVD and a next-generation optical disk when used for forming an Ag-based alloy reflective film or a semipermeable reflective film on an optical information recording medium, by using the Ag-based alloy which has been found to have higher thermal conductivity, reflectance and durability than pure Ag and conventional Ag alloys have. SOLUTION : The sputtering target of the Ag-based alloy for the optical information recording medium includes 0.05-4.5% Bi, or 0.005-0.40% Sb and further at least one of rare earth metal elements. COPYRIGHT : (C)2005, JPO&NCIPI


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