ELECTROSTATIC CHUCK

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One embodiment of the present invention discloses an electrostatic chuck made of an aluminum nitride sintered body, wherein the aluminum nitride sintered body comprises aluminum nitride and a composite oxide formed along the grain boundaries of the aluminum nitride, and wherein the composite oxide comprises at least two kinds of rare earth metals which have an employment relationship with each other, and a collection area having a higher oxygen content than that of the surrounding area.