METHOD FOR PRODUCING POWDER CONTAINING TANTALUM (V) OXYNITRIDE

文件类型：PDF文档
文件大小：75K
PROBLEM TO BE SOLVED : To provide a method for producing powders containing tantalum (V) oxynitride. SOLUTION : A method for producing the tantalum (V) oxynitride which synthesizes powders containing tantalum (V) oxynitride is obtained by heat-treating powders in which there are mixed an aluminum nitride to be a feed source of nitrogen component for nitriding the tantalum, an alkaline metal as a mineralizer for promoting nitriding, a salt of alkaline earth metal or a mixture of salts thereof, as a starting material of tantalum oxide powders, under a nitrogen atmosphere or nitrogen stream. In this case, the method for producing powders containing tantalum (V) oxynitride is obtained at lower temperature in a short time without using an ammonia gas having toxicity, compared with a conventional synthesis method. COPYRIGHT : (C)2009, JPO&INPIT