文件类型:PDF文档
文件大小:78K
PROBLEM TO BE SOLVED : To provide a guide device capable of reducing the entering of fine particles into bellows.
SOLUTION : The guide device 10 comprises a guide bar 11 linearly extended; sliding bearings 16, 17 reciprocating along a guide; a first bellows 14 and a second bellows 15 disposed at first end sides in a moving direction of the sliding bearings 16, 17 to cover the guide bar 11, and expanding/contracting with reciprocating movement of the sliding bearings 16, 17; a gas communicating passage communicating the inside of the first bellows 14 and the inside of the second bellows 15, and composed of a second flow passage 11b, a forth flow passage 12a, a branch pipe 24, a branch pipe 25, a fifth flow passage 13a, and a third flow passage 11c; and a gas supply source 27 adding pressure exceeding atmospheric pressure to the branch pipe 24 and the branch pipe 25 composing the gas communicating passage.
COPYRIGHT : (C)2008, JPO&INPIT