CORROSION-RESISTANT FILM HAVING FLUORIDE FILM OF RARE EARTH ELEMENT, AND ITS MANUFACTURING METHOD

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PROBLEM TO BE SOLVED : To provide a dense corrosion-resistant film thinner in film thickness and having high plasma corrosion resistance, and its manufacturing method for depositing the corrosion-resistant film at the lower temperature as compared with the conventional art. SOLUTION : The corrosion-resistant film has a fluoride film of rare earth elements obtained by fluorination of an oxide film of rare earth elements deposited on a base material. Preferably, the oxide film of the rare earth elements is composed of an aggregate of oxide particles of the rare earth elements having the volume averaged grain size being 10-300 nm. COPYRIGHT : (C)2007, JPO&INPIT