ULTRAVIOLET LIGHT SOURCE SYSTEM

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PROBLEM TO BE SOLVED : To provide an ultraviolet light source system with quick start-up and closing-down, with a simple structure concerning optical elements such as a mirror and a filter, and doing away with a cooling mechanism due to small heat radiation and consumption power of a lamp, by attaining high irradiation intensity in one using a rare-gas discharge lamp. SOLUTION : The ultraviolet light source device is provided with an arc tube of nearly a straight-tube shape with rare gas containing xenon sealed in, a light-extraction window formed at one of the end faces of the arc tube with permeability to ultraviolet rays with a given wavelength band, a phosphor layer irradiating ultraviolet rays of a given wavelength band formed on an inner periphery wall face almost throughout a whole length of the arc tube, a rare-gas discharge lamp formed on an outer surface of the arc tube equipped with at least a pair of external electrodes, and a power source supplying power to the external electrodes. The system irradiates the ultraviolet rays of the given wavelength band from the light-extraction window. COPYRIGHT : (C)2007, JPO&INPIT