VACUUM DEPOSITION METHOD FOR FORMING ALLOY FILM ON SURFACE OF PIECE BY VAPOR DEPOSITION

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PROBLEM TO BE SOLVED : To provide a method for easily forming an alloy film having various metallic compositions on the surface of a piece such as a rare earth based permanent magnet by vapor deposition.SOLUTION : Regarding the vacuum deposition method, an alloy film at least containing two kinds of metals, a metal A and a metal B (wherein, the vapor pressure of the metal B is higher than that of the metal A) is formed on the surface of a piece as the object to be treated by vapor deposition. In a film raw material melting-evaporating part at the inside of a vacuum treatment chamber, electron beams are emitted to a solid of the metal A in a crucible and an alloy wire comprising the metal A and the metal B and guided to the direct upper part of the crucible at a prescribed feed rate, and the solid of the metal A and the alloy wire are simultaneously melted and evaporated, thus the alloy film having a metallic composition in accordance with the feed rate of the alloy wire is formed on the surface of the piece located in the upper part of the film raw material melting-evaporating part by vapor deposition.COPYRIGHT : (C)2007, JPO&INPIT