ALUMINUM-NICKEL-RARE EARTH ELEMENT ALLOY SPUTTERING TARGET

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An Al-base alloy sputtering target comprising Ni and one or more rare earth elements, wherein there are 5.0 × 10 4 /mm 2 or more compounds whose aspect ratio is 2.5 or higher and whose equivalent diameter is 0.2µm or larger, when a cross sectional surface perpendicular to the plane of the target is observed at a magnification of 2000 or higher.