METHOD AND APPARATUS FOR ELECTRON BEAM SURFACE MODIFICATION

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PROBLEM TO BE SOLVED : To solve such a problem that, in surface modification for radiating an electron beam pulse having a large cross sectional area and a large energy density, outer peripheral surfaces near the top portion of a pillar shape body or a truncated body are modified, but in a pillar shape body having corner portions on its cross section, the modified zones of the side surfaces are not uniform in its longitudinal direction. SOLUTION : Until now, the electron beam has been generated and radiated as follows. A magnetic field for binding natural electrons in an electron gun section filled with ionized rare gas in the low pressure state has been formed by supplying an electric current to a solenoid. When the generation of the magnetic field has arrived at a required state, anode plasma is generated by means of an annular anode. When the generation of the anode plasma during the generation of the magnetic field has arrived at a required generation state, the electron beam is generated by applying a high and short negative voltage pulse to a cathode. Then, the electron beam is radiated by using the anode plasma as a passage. In the present method, the modified zone on the side surfaces is equalized by reversing the solenoid current for forming the magnetic field for every repeated cycle of the generation and radiation of the electron beam. COPYRIGHT : (C)2007, JPO&INPIT