DEVICE FOR MANUFACTURING SHEET-LIKE SUBSTRATE

文件类型：PDF文档
文件大小：94K
PROBLEM TO BE SOLVED : To provide a device for manufacturing a sheet-like substrate in which a sheet-like substrate formed with a simple structure is manufactured without falling from the device with an increased yielding rate. SOLUTION : A device 20 manufactures a sheet like substrate, in which a base substrate 21 is immersed in a melt 24 of a semiconductor material such as silicon while being transported and the sheet-like substrate 27 is manufactured by solidifying and growing silicon on a surface 35 of the base substrate 21. The device 20 is equipped with a receiving means 45 for receiving falling substrate which is placed at a part 21a in the end of the front side of the transporting direction of the base substrate 21 and at a part 21b in the end of the rare side of the transporting direction. The receiving means 45 receives the sheet-like substrate 27 which is generated on the surface 35 of the base substrate 21 and falls from the surface 35. COPYRIGHT : (C)2007, JPO&INPIT