CORROSION RESISTANT MEMBER OF WHICH SURFACE STATE IS NOT CHANGED EVEN AFTER USE IN A CHLORINE-BASED

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PURPOSE : A corrosion resistant member which has a surface to be exposed to a chlorine-based corrosive gas such that the surface is sufficiently resistant to exposure to a chlorine-based gas or plasma thereof, undergoes no deterioration of corrosion resistance upon periodic cleaning, and is free of contamination is provided. CONSTITUTION : As a material exposed to a chlorine-based gas or a chlorine-based gas plasma, a corrosion resistant member is characterized in that the material surface does not absorb moisture even when the material surface is exposed to the atmosphere after a surface of the material is exposed to a chlorine-based gas or a chlorine-based gas plasma. The chlorine-based gas is Cl2, a mixed gas containing Cl2, or a mixed gas containing the chlorine-based gas. The corrosion resistant member is a rare earth element fluoride. The rare earth element is one more elements selected from the group consisting of Y, Sc, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. © KIPO 2007