VACUUM ULTRAVIOLET LASER BEAM SOURCE AND METHOD FOR GENERATING VACUUM ULTRAVIOLET LASER

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PROBLEM TO BE SOLVED : To generate a vacuum ultraviolet laser beam by stably exciting a rare gas in a compact configuration. SOLUTION : The vacuum ultraviolet laser beam source 1 provided with a fibrous and cylindrical hollow fiber 4 that contains the rare gas inside, a laser device 16 that irradiates a laser beam that generates the vacuum ultraviolet beam by photoelectrically ionizing the rare gas into the hollow fiber 4, and optical resonators (4+7+8) that are disposed as opposed to both end sections of the hollow fiber 4 and have a pair of mirrors 7, 8 that reflect and amplify the vacuum ultraviolet beam. COPYRIGHT : (C)2007, JPO&INPIT