CORROSION-RESISTANT MEMBER AND PRODUCING METHOD THEREOF

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PURPOSE : A corrosion resistant material containing calcium and aluminum oxides or calcium aluminum oxide is provided to endure halogen plasma corrosive gas or high temperature corrosive condition by comprising calcium oxide and aluminum oxide or calcium aluminum oxide and a corrosion inhibitor having less amount of rare-earth element. CONSTITUTION : The corrosion resistant material comprises oxide including calcium oxide and aluminum oxide at a portion of the material which is exposed to corrosive condition, and a corrosion inhibitor containing less than 5wt.%% of rare-earth element. The material consists of a base made of aluminum nitride and a corrosive layer which is applied to the surface of the base and formed of the corrosion inhibitor. The corrosion inhibitor contains 30 to 80wt.%% of calcium and 20 to 70wt.%% of aluminum. The corrosive layer has thickness ranging from 0.5 to 20 micrometers and average roughness or 0.05 to 2.0 micrometers on the surface thereof. © KIPO 2007