Production of multilayer ceramic substrate with a cavity

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PROBLEM TO BE SOLVED : To solve the problem that a cavity is deformed undesirably since contraction of relatively high degree is generated in a position far from an opening end of a cavity wherein a contraction control function by a contraction control layer is weakened when a multilayer ceramic with a cavity is manufactured by using a so-called non-contraction process. SOLUTION : The radial dimension of a cavity 16 formed in a rare substrate laminated body 13 is made smaller as it gets far from an opening end 15 of the cavity 16. Consequently, the cavity 16 can provide a uniform radial dimension in a substrate laminated body 23 after being baked regardless of contraction of higher degree generated in a position far from the opening end 15 wherein a contraction control function by a contraction control layer 14 in baking process is weakened. COPYRIGHT : (C)2003, JPO