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PROBLEM TO BE SOLVED : To provide an exhaust gas cleaning filter having a metal oxide nano porous body which is high in adherability and excellent in heat resistance for a silicon carbide-made base material such as silicon carbide-made base material for DPF, capable of being thinned and depositing a thin film on not only a surface of the silicon carbide base material but also on a wall surface in pores.
SOLUTION : The exhaust gas cleaning filter has a silicon carbide base material, and a metal oxide nano porous material consisting of two or more kinds of metal oxides to be selected from a group consisting of alumina, zirconia, titania, iron oxide, rare earth element oxide, alkali metal oxide, and alkaline earth metal oxide carried by the silicon carbide base material. The nano porous body has nano pores having the diameter of ≤10 nm, and the metal oxide is homogeneously distributed in a wall to constitute the nano pores.
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