aLCOHOLATES OF rARE-EARTH METALS AS PRECURSORS FOR [...] AND FILMS

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Rare Earth Metal-Precursor for use in MOCVD techniques, comprising the following general Formula : wherein M is a rare earth metal, R 1 H or a Alkyl group, R 2 an optionally substituted Alkyl group, and X selected 2 is from OR and NR, wherein R is an alkyl group or a substituted alkyl group, and n = 1 to 4.