A manufacturing method of a superconductor

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PROBLEM TO BE SOLVED : To provide a method for manufacturing a superconductor in which an epitaxially oriented rare earth 123 type superconducting film can be heat treated at a lower temperature. SOLUTION : In the method for manufacturing the superconductor in which the rare earth 123 structure type oxide superconducting film having a composition of YbBa2Cu3O7-yis provided on a substrate, the epitaxially oriented YbBa2Cu3O7-yfilm is formed by successively carrying out : a first step for preparing a precursor film consisting of a mixture of barium carbonate or barium fluoride, ytterbium oxide and copper oxide on the substrate and then successively performing heat treatments for forming YbBa2Cu4O8by heat treating the precursor film in a temperature range of 675 to 800°C in a high oxygen partial pressure atmosphere having an oxygen partial pressure of 0.25 to 1 atm; a second step for forming tetragonal YbBa2Cu3O6by heat treating the resultant YbBa2Cu4O8in a temperature range of 675 to 850°C under a low oxygen partial pressure of 1×10-5to 1×10-3atm; and a third step for forming monoclinic YbBa2Cu3O7-yby heat treating the tetragonal YbBa2Cu3O6in the temperature range of 200 to 500°C under a high oxygen partial pressure of 0.2 to 1 atm. COPYRIGHT : (C)2004, JPO