A focused ion beam generator

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A focused ion beam (FIB) generator comprises a unitary solid electrolyte body 1 having a tip 3 from which a focused beam of ions is emitted, and a unitary solid reservoir body 2 contacting the body 1 and comprising material to forward ions to the body 1 for emission. The bodies 1 and 2 are in close contact and may be spring-loaded against each other. The generator may be heated or cooled. The body 1 may be made of a halogenide, especially silver halide, or a phosphate, especially silver phosphate, or a chalcogenide or a mixture thereof, in particular API. The body 2 may be a metal, in particular silver. Cations emitted may be Ag, Li, Na, K, Ca, Cu, Al or a rare earth metal ion. Anions emitted may be O or F. Methods of making the tips are described, including pulling a thin fibre from a melt and tearing the fibre apart in a micropipette puller.