Preparation of water-free rare earth metal halogenide comprises reacting a rare earth metal oxide wi

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Of is a process, wherein the rare earth metal oxides are reacted with halogenating agents of the general formula 1 · X · 2 · X · dOLLAR A [...] · 3 · (1) dOLLAR A with M = Si, Ge, Sn, Ti, Zr, Hf dOLLAR A Hal = Cl, Br, I dOLLAR A X · 1 ·, X · 2 ·, X · 3 · = independently Cl, Br, I, H, alkoxy (-OR), wherein R is an organo radical with 1-20 carbon atoms represents, alkyl having 1 to 20 carbon atoms or aryl having 6 to 20 carbon atoms, wherein the alkyl or aryl radicals one or more other halogen substituents, selected from the group consisting of F, Cl, brr or I, dOLLAR A may carry in an aprotic, polar solvent containing rare-earth metal halidessynthesis mixturesdOLLAR A Of be reacted further. and their use are anhydrous.