CONDUCTIVE SILICON NITRIDE MATERIAL AND ITS MANUFACTURING METHOD

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PROBLEM TO BE SOLVED : To provide a conductive silicon nitride sintered body having excellent strength, fracture toughness or the like. SOLUTION : The conductive silicon nitride sintered body contains 2-20 wt.% Si-R-Mg-Al-O-N compound obtained by adding 0.1-5 wt.% magnesium oxide having ≤1.0 μm average grain size or grain boundary phase mainly containing Si-R-Mg-O-N compound (R represents a rare earth element) and the balance of the silicon nitride and 0.3-12 outer wt.% CNT. The material is useful as a resistive body. COPYRIGHT : (C)2006, JPO&NCIPI