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X-ray detector and X-ray inspection device using the same

2025-06-18 03:384530下载
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An X-ray detector ( 5 ) comprises an X-ray-electric charge conversion film ( 21 ) for directly converting into charges an incident X-ray that has passed through a subject ( 2 ) and is received, and a charge information reading section ( 15 ) for detecting charges produced by the X-ray-electric charge conversion film ( 21 ) as image signals. The X-ray-electric charge conversion film ( 21 ) consists essentially of a rare-earth compound containing at least one of rare-earth element and at least one of element selected from oxygen, sulfur, selenium and tellurium. The X-ray-electric charge conversion film ( 21 ) does not adversely affect human bodies and environment, and is excellent in sensitivity, film-forming feature and the like. Accordingly, the X-ray detector ( 5 ) which is provided with the improved X-ray detection sensitivity, detection accuracy and the like with environmental loads and the like decreased can be provided.


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