RARE EARTH METAL COMPLEX, MATERIAL FOR THIN-FILM FORMATION, AND PROCESS FOR PRODUCING THIN FILM

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A rare earth metal complex which is a tris-s-butylcyclopentadienyl/rare earth metal complex represented by the following general formula (I). It is a liquid rare earth metal complex excellent in heat resistance and volatility and suitable for use as a material for thin-film formation. (In the formula, M represents a rare earth metal.) © KIPO & WIPO 2007