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Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite 5A

2025-06-20 18:131330下载
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The present invention refers to pyridinium methylcephem compound relates to a sorbing agent which is and method, of an alkaline-earth metal is ion exchanged with 150 ∼ 600 °C ∼ 100 ingredient 30 in heating at a processing zeolite 5A it buys the fire anger carbon the through a column a charging a (CF 4) pyridinium methylcephem containing (NF 3) by by venting of the gas, selectively adsorbed only pyridinium methylcephem pyridinium methylcephem compound including the zeolite and method made 5A relates to adsorbent pyridinium methylcephem.


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