STERILIZING, CLEANING OR CLARIFYING APPARATUS BY NEGATIVELY CHARGED OXYGEN ATOM

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PROBLEM TO BE SOLVED : To provide a sterilizing, cleaning or clarifying apparatus for liquid itself or an object placed in the liquid using such the characteristics of a negatively charged oxygen atom (O-) that it has strong sterilizing power and cleaning power and easily returns to safe O2 in water. SOLUTION : The sterilizing, cleaning or clarifying apparatus by using negatively charged oxygen atoms heats a member composed of a calcium aluminate compound oxide or composed of a compound oxide containing at least cerium to discharge negatively charged oxygen atoms, transports the negatively charged oxygen atoms from a negatively charged oxygen atom generation part by a rare gas flow or a dry air flow to release the atoms into the liquid, and the sterilizes or clarifies the liquid itself, or cleans the object (such as a semiconductor wafer) placed in the liquid. COPYRIGHT : (C)2006, JPO&NCIPI