Method and device for recovering rare gas

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PROBLEM TO BE SOLVED : To provide a cost-effective rare gas recovery method and an apparatus therefor by using an inexpensive regeneration gas in place of gaseous N2, and realizing recovery of rare gas, such as argon, in an efficiency as high as that of conventional recovery. SOLUTION : In the rare gas recovery method, a used impure rare gas is sent to a preprocessing unit 2, and oxygen and hydrogen are added to perform the combustion removing processing of inflammable components, hydrogenation removal of oxygen, and adsorption treatment of moisture and carbon dioxide. Subsequently, the resulting gas is sent to a low temperature liquefaction separator 3, and low temperature liquefaction separation is carried out to obtain a purified rare gas. As a regeneration gas in the regeneration process in a moisture and carbon dioxide adsorber 6, dry air, air which is dry and does not contain carbon dioxide, or waste gas produced in a juxtaposed low temperature air separation apparatus 15 is used for at least the former half of the heating time-zone among the former and latter halves of the heating time-zone, and the former half of the cooling time-zone. Gaseous nitrogen is used for the subsequent remaining time-zone.