TERMINATION METHOD OF DIAMOND ELECTRODE

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PROBLEM TO BE SOLVED : To provide a method for precisely terminating a diamond electrode 42 by a desired atom to obtain the diamond electrode 42 having a more complete terminal surface.SOLUTION : The termination method of the diamond electrode includes a rare gas terminating process for sputtering the surface of the diamond electrode 42, which is terminated by hydrogen, by a rare gas to terminate the diamond electrode 42 by the rare gas and a target substance terminating process for replacing the rare gas on the surface of the diamond electrode 42 with a target substance to terminate the diamond electrode 42.COPYRIGHT : (C)2006, JPO&NCIPI