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TOOL FOR FIRING AND METHOD OF MANUFACTURING SINTERED COMPACT USING THE SAME

2025-06-17 13:184380下载
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PROBLEM TO BE SOLVED : To provide a tool for firing which prevents a reaction with a sintered compact and prolongs the service life of the substrate itself and a method of manufacturing a non-oxide sintered compact. SOLUTION : The tool for firing is manufactured by forming a coating film comprising an Re2O3 (Re : Y or a rare-earth element) or Ti carbide, Ti nitride, Ti oxide, or their complex compound on the surface of a ceramic substrate comprising at least one selected from among Al2O3, ZrO2, MgO, Si3N4, and SiC and having a porosity of ≥0.2%.


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