X-RAY INSPECTION DEVICE USING CATHODE CONTAINING BORIDE OF Ce (CERIUM) OR Gd (GADOLINIUM)

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PROBLEM TO BE SOLVED : To provide an X-ray inspection device using a cathode, which contains a boride of Ce or Gd which is a rare earth element (CeBix, CeB12, GdB4, GdB6 or the like) as a thermoelectron radiation cathode which is an electron source, and having high resolving power. SOLUTION : In the X-ray inspection device, equipped with at least an electron gun, an electronic lens, a target and a detector, the thermoelectron radiation cathode used in the electron gun is constituted of the cathode, containing a boride of Ce(cerium) or Gd(gadolinium) which is a rare earth element. The cathode material, containing the boride of Ce or Gd is used as the electron source, is used in this X-ray inspection device but an electron beam probe having brightness by several times as compared with conventional electron beam probes, using lanthanum hexaboride (LaB6) using reduced total electron flow is obtained.