HARD CARBON FILM, AND METHOD FOR MANUFACTURING THE SAME

文件类型：PDF文档
文件大小：36K
PROBLEM TO BE SOLVED : To provide a hard carbon film showing a friction coefficient as low as ≤0.04 in lubricating oil, and a method for manufacturing the same. SOLUTION : In order to increase the ratio of dangling bonds present on the surface, a hard carbon film is irradiated with rare gas plasma after or during film deposition on a substrate, and subjected to sliding motion mainly under lubricating oil. The substrate is preferably maintained at a temperature of ≤150°C.