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Disclosed is a method for commercially producing COF2 at high yield. A method for producing carbonyl fluoride by continuously supplying carbon monoxide (A) and fluorine (B) into a reaction chamber (1) together with a rare gas and having them react with each other is characterized in that hydrogen fluoride or carbonyl fluoride is used as the rare gas. An apparatus for producing carbonyl fluoride wherein carbon monoxide (A) and fluorine (B) are reacted for production of carbonyl fluoride is characterized by comprising a means for supplying carbon monoxide (A), a means for supplying fluorine (B), a means for supplying a rare gas composed of hydrogen fluoride or carbonyl fluoride, and a reaction chamber.