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Manufacturing method of thick film for detecting a neutron by vacuum evaporation and metal plate hav

2025-06-18 01:211500下载
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PURPOSE : A manufacturing method of thick film having a thickness of tens of μm or more which can be used for detecting a neutron, and which is not delaminated or degraded is provided, and a metal plate having the thick film for detecting a neutron is provided. CONSTITUTION : In a metal plate for detecting a neutron comprising an aluminum substrate(100), the metal plate for detecting a neutron comprises a rare earth metal film(300) which is adhered onto an upper surface of the aluminum substrate and has a thickness of 10 to 50 μm; and a protection film(400) formed on the rare earth metal film by depositing a metal oxide for preventing oxidation of the rare earth metal film as a source to a thickness of 200 to 1, 000 Å on an upper surface of the rare earth metal film, wherein the metal plate for detecting a neutron further comprises an interface film(200) formed by depositing aluminum oxide for increasing cohesive force of the substrate and the rare earth metal film as a source to a thickness of 200 to 1, 000 Å between the aluminum substrate and the rare earth metal film.


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