分享好友 知识库首页 频道列表

Device for producing silicon single crystal

2025-06-18 22:441500下载
文件类型:PDF文档
文件大小:234K
An apparatus for manufacturing a single crystal of silicon includes a crucible, a heater (1), electrodes (2), and a magnet. In addition to a plurality of heat generating portions (4) and two main electrode portions, the heater has two or more auxiliary electrode portions (3). Two or more heater support members having an insulating property are further provided so as to support the heater through the auxiliary electrode portions. The number of heat generating portions which may be present between a heater support member and an electrode and between heater support members if adjacent to each other is equal to or less than 4. Each generating portion of the heater has a thickness of 25 mm or more. This structure makes it possible to produce a single crystal of silicon without causing breakage of a heater, even if a large electric current flows through the heater, even if a magnetic field of a high intensity is applied to a silicon melt in the crucible, and even if the heater has a large diameter.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0