ALLOY OF AMORPHOUS LIGHT RARE EARTH-TRANSITION METAL AND SEMIMETAL AND A MANUFACTURING METHOD THEREO

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PURPOSE : An alloy of amorphous light rare earth-transition metal and semimetal and a manufacturing method thereof are provided to increase vertical magnetic anisotropy on a film surface. CONSTITUTION : A manufacturing method of an alloy of amorphous light rare earth-transition metal and semimetal, depositing semimetal on amorphous light rare earth-transition metal by a sputtering method includes a step of differently giving argon-sputtering pressure according to a sign of a saturated magnetostriction constant and making the saturated magnetostriction constant and the sign of stress opposed. If the sign of the saturated magnetostriction constant of the alloy is positive, low argon-sputtering pressure is given to make the inner stress state of the alloy become a negative compressive stress state. If the sign of the saturated magnetostriction constant of the alloy is negative, high argon-sputtering pressure is given to make the inner stress state of the alloy become a positive compressive stress state. © KIPO 2006