| 申请日期 | 2025-07-11 | 申请号 | US15142172 |
| 公开（公告）号 | US10106879B2 | 公开（公告）日 | 2018-10-23 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED | ||
| 简介 | This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE—O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element. | ||
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