申请日期 | 2025-07-11 | 申请号 | US15142172 |
公开(公告)号 | US10106879B2 | 公开(公告)日 | 2018-10-23 |
公开国别 | US | 申请人省市代码 | 全国 |
申请人 | TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED | ||
简介 | This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE—O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element. |
您还没有登录,请登录后查看下载地址
|