| 简介 |
Provided is a spray coating containing a rare earth fluoride and/or a rare earth acid fluoride, wherein carbon is contained therein at 0.01-2% by mass or titanium or molybdenum is contained therein at 1-1000 ppm, and wherein, in the case in which an acid fluoride is not contained therein, the spray coating is gray to black in which, in terms of the L*a*b* chromaticity, L* is 25-64, a* is -3.0 to +5.0, and b* is -4.0 to +8.0, and, in the case in which an acid fluoride is contained therein, the spray coating is white or gray to black in which, in terms of the L*a*b* chromaticity, L* is equal to or greater than 25 and less than 91, a* is -3.0 to +5.0, and b* is -6.0 to +8.0. By forming this coating on a plasma resistant member, a partial color change is reduced, the situation in which said member is washed in a manner that causes partial deterioration thereof when being removed and washed is eliminated, and thus, a member that is capable of reliably realizing the original longevity thereof is obtained. |
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