| 简介 |
A method for pre-treating a substrate for surface coating includes subjecting the substrate to metal ions and noble gas ions selected from the group of argon-ions, krypton-ions, neon-ions, xenon-ions and helium-ions in a vacuum chamber and applying a negative electrical potential on the substrate. The substrate is pre-treated in at least two steps that are performed subsequently in the vacuum chamber. The first step includes providing a plasma of predominantly noble gas ions selected from the group of argon-ions, krypton-ions, neon-ions, xenon-ions and helium-ions in the vacuum chamber, and applying a first negative electrical potential on the substrate. The second step includes providing a plasma of predominantly metal ions in the vacuum chamber, and applying a second negative electrical potential on the substrate, wherein the first electrical potential is lower than the second electrical potential, and wherein the magnitude of the first negative potential is 100-1500 V. |
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