| 简介 |
PROBLEM TO BE SOLVED : To provide a sputtering target containing a rare-earth element as an auxiliary component element of a minute amount, a method for producing a metal oxide containing a rare-earth element, and a sputtering target manufacturing method.SOLUTION : A sputtering target contains a metal oxide expressed by the following formula 1, and contains a rare earth element homogeneously dispersed. In A1-xRexTiyO3---(Eq. 1) (In Eq. 1 : A : at least one kind of alkaline earth metal element; Re : at least one kind of rare-earth element; Ti : titanium; O : oxygen, 0
|
客服热线：
手机版
二维码
