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POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION 发明授权

2023-04-26 1120 4209K 0

专利信息

申请日期 2025-06-27 申请号 KR1020177016746
公开(公告)号 KR101865232B1 公开(公告)日 2018-06-08
公开国别 KR 申请人省市代码 全国
申请人 닛폰 이트륨 가부시키가이샤
简介 The present invention relates a coating powder comprising a rare earth oxyfluoride (Ln-O—F) and having : an average particle size (D50) of 0.1 to 10 μm, a pore volume of pores having a diameter of 10 μm or smaller of 0.1 to 0.5 cm3/g as measured by mercury intrusion porosimetry, and a ratio of the maximum peak intensity (S0) assigned to a rare earth oxide (LnxOy) in the 2θ angle range of from 20° to 40° to the maximum peak intensity (S1) assigned to the rare earth oxyfluoride (Ln-O—F) in the same range, S0/S1, of 1.0 or smaller in powder X-ray diffractometry using Cu-Kα rays or Cu-Kα1 rays.


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