| 申请日期 | 2025-09-14 | 申请号 | WOJP17038667 |
| 公开（公告）号 | WO2018100932A1 | 公开（公告）日 | 2018-06-07 |
| 公开国别 | WO | 申请人省市代码 | 全国 |
| 申请人 | KOBELCO RESEARCH INSTITUTE INC | ||
| 简介 | Provided is an aluminum alloy sputtering target characterized by comprising a total amount of 0.01-0.04 at.% of one or more elements selected from the group consisting of Ni, Cr, Fe, Co, and Cu, a total amount of 0.01-0.06 at.% of one or more elements selected from rare-earth elements except for La, and the remaining portion being Al and unavoidable impurities. | ||
|
您还没有登录，请登录后查看下载地址
|
客服热线：
手机版
二维码
